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Silicon etching in a pulsed HBr/O−2 plasma. I. Ion flux and energy analysis

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Figure 4 shows the obtained ion fluxes in clean and seas- seas-oned condition. Significant differences of the ion flux can be observed.
Figure 6 shows the total ion flux with respect to the bias power for the HBr and HBr/O 2 plasma obtained from RFA and IFP measurements
Figure 8 shows the time averaged IVDF for a pulsed HBr plasma at different duty cycles, as well as the corresponding ion flux

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