Etude et simulation des paramètres technologiques et électriques des structures réalisées à base de composés nitrurés.

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(62) 12345678594

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(64) 12345678594

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(66) . 12345678594

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(70) . 12345678594

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(74) CHAPITRE I : Propriétés des nitrures. Pression dans le réacteur Température de substrat Vitesse de croissance Précurseurs remarques. 10. c. EJM − 10 Torr. 500-900°C. EPVOM 20-500 Torr 500-1200°C. 0.1-1 µm/h. 0.2-5 µm/h. NH3, N2, sources solides métallique (Ga,Al,In) -contrôle des épaisseurs, des compositions et maitrise des interfaces. -phase de developpement. NH3, tri méthyle -Ga,- Al, - In triéthyle -Ga -croissance rapide. -plateaux multi-substrat et substrat a grande dimension. -production industrielle.. EPVH 3.7 .10 − 7.5 .109 Torr 900-1100°C 9. 10-100 µm/h HCl, NH3, bain métallique (Ga,Al) -Couche épaisse de substrat GaN autosupportés. -production industrielle.. Tableau I-10 : Principales caractéristiques des trois techniques de croissance généralement utilisées pour l’épitaxie de nitrures d’éléments III. [13]. V-. Conclusion :. Nous avons introduit dans ce chapitre les principales caractéristiques du cristal GaN. Ainsi que les principaux paramètres physiques et électriques qui distinguent le GaN des autres matériaux.. Le GaN démontre sa supériorité face au GaAs et aux semi-conducteurs à faible largeur de bande interdite, c’est un candidat prometteur pour les transistors grâce à ses propriétés physiques et électriques remarquables.. L’AlN et le diamant sont également de très bons candidats pour la génération de puissance à haute fréquence, seulement il est difficile de trouver des échantillons de taille raisonnable ayant des propriétés électriques contrôlées. De plus, la réalisation de contacts électriques de bonne qualité est difficile, ce qui diminue la performance finale du composant.. 23.

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