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LiNbO3 Film Bulk Acoustic Resonator

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Academic year: 2021

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Figure 2.   High order harmonics of the HBAR modulated by the first two  harmonics of the thinned LiNbO 3  layer
Figure 4.   Comparison of the first resonance of a FBAR response simulated  considering a homogeneous thickness on the LiNbO 3  (black), assuming an
Figure 5.   Comparison of non optimized simulated pass band filters based  on X-cut LiNbO 3  (black) and traditional sputtered AlN (red)

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