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A New Embedded Measurement Structure for eDRAM Capacitor

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HAL Id: hal-00181649

https://hal.archives-ouvertes.fr/hal-00181649

Submitted on 24 Oct 2007

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A New Embedded Measurement Structure for eDRAM

Capacitor

L. Lopez, Jean-Michel Portal, D. Nee

To cite this version:

L. Lopez, Jean-Michel Portal, D. Nee. A New Embedded Measurement Structure for eDRAM

Capac-itor. DATE’05, Mar 2005, Munich, Germany. pp.462-463. �hal-00181649�

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