HAL Id: hal-00181649
https://hal.archives-ouvertes.fr/hal-00181649
Submitted on 24 Oct 2007
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A New Embedded Measurement Structure for eDRAM
Capacitor
L. Lopez, Jean-Michel Portal, D. Nee
To cite this version:
L. Lopez, Jean-Michel Portal, D. Nee. A New Embedded Measurement Structure for eDRAM
Capac-itor. DATE’05, Mar 2005, Munich, Germany. pp.462-463. �hal-00181649�
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