• Aucun résultat trouvé

Potential of dry etching for the fabrication of fused silica micro-optical elements

N/A
N/A
Protected

Academic year: 2022

Partager "Potential of dry etching for the fabrication of fused silica micro-optical elements"

Copied!
8
0
0

Texte intégral

(1)

Published in Micromachine Technology for Diffractive and Holographic Optics - Proceedings of SPIE 3879, 63-70, 1999

which should be used for any reference to this work 1

(2)

2

(3)

3

(4)

4

(5)

5

(6)

6

(7)

7

(8)

8

Références

Documents relatifs

1 Published in Proceedings of the Royal Society of Edimburgh 98B, 63-73, 1992. which should be used for any reference to

It is shown that multidirectional rotation of the group of microparticles is possible with the superposition of vortex beams with a different sign of the topological

In our experiments, the possibility of creating optical structures of submicron resolution, including with elements smaller than the diffraction limit (0.25 μm), based on

Concerning Lamé system we refer to [22] where a uniqueness result has been stated for the recovery of time-independent source terms by mean of suitable Carleman estimate and we

We show that C m is a local sharp maximum of the distance function, so in particular the configuration C m is not only unlockable but

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des

The Sb(K) and Te(K) ionization peaks used for quantitative analysis are located at 26.4 keV and 27.4 keV.. a) Transmittance and b) Reflectance spectra for different film

However, in English search, the best results are obtained when Random Forest is combined with the selection algorithm InfoGainAttributeEval IGA, it takes into account the most