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Broad ion energy distributions in helicon wave-coupled helium plasma

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Academic year: 2021

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Figure

TABLE I. Summary of the conditions for the baseline plasma discharge  cases used in this study
FIG. 2.  Double Langmuir probe configuration used to measure the plasma density and electron temperature under the various  plasma discharge conditions
FIG. 3. An example diagram of the double Langmuir probe I-V data along with the linear fits to the ion saturation regions and to  the  inflection  point  region
FIG. 4. Potential diagram in the RFEA for this study. The grid aperture size is 152 μm and the space between the grids is 635 μm
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