• Aucun résultat trouvé

Plasma doping implant depth profile calculation based on ion energy distribution measurements

N/A
N/A
Protected

Academic year: 2021

Partager "Plasma doping implant depth profile calculation based on ion energy distribution measurements"

Copied!
8
0
0

Texte intégral

Loading

Figure

Figure 1 shows a schematic drawing of the PLAD cham- cham-ber, where implants and plasma diagnostic experiments were carried out
Figure 9共a兲 shows the equivalent boron and fluorine IEDs under the previous discharge conditions
Figure 11共a兲 shows the role of each ion species reaching the wafer; B + defines the depth of the implant, BF + and BF 2 + are the main contributors to the surface dose, and BF 3 + does not have significant impact on the SIMS profile

Références

Documents relatifs

[ 10 ], who analyzed cycling Chinese hamster ovary (CHO) cells using flow cytom- etry. They reported variability in G1 phase caused mainly by unequal division of

When asking the pattern classes achieving the highest degree of pertinence in the beginning of Bach’s Prelude in C, BWV 846, we obtain the 8-note pattern (line #4 of

A l’aide de notre bilan hydrologique et des concentrations en carbone dans les eaux de nappes et de ruisseaux d’ordres croissants, nous avons pu déterminer le

typical FHA project evaluated is the Section 236 subsidized public housing, where all the units are made available to qualified low and moderate income households

Il en résulte que la stabilisation de la terre argileuse avec le mélange CCR:CBR a améliorée la résistance mécanique des BTCs en accélérant la maturation, par rapport à la

After completion, the reaction mixture was quenched with water and extracted three times with ethyl acetate washed with water and brine, and dried over sodium sulfate.

As a consequence it is important to consider the distribution of the B within the overall microstructure of ferritic steels as the role of the boron impurity could depend on

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des