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Impact of Li non-stoichiometry on the performance of acoustic devices on LiTaO3 and LiNbO3 single crystals

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Academic year: 2021

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Fig. 1.5 Phase diagram of Li 2 O-Nb 2 O 5 (Fig. modified from Ref.[18]) (a) and phase diagram of Li 2 O-Ta 2 O 5
Table 1.5 Propagation characteristics of single crystals used in BAW and SAW devices: V, K 2 and TCF
Fig. 1.24 Different type of BAW resonators based on thin films: Thin Film Bulk Acoustic Resonator, FBAR, (a), Solidly Mounted Resonators, SMR, (b) and the High Overtone Bulk Acoustic Resonator, HBAR, (c)
Table 1.7 Propagation characteristics of thin film/substrate structure used in SAW devices: V, K 2 and TCF
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