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Submitted on 24 Jul 2020
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Denis Langevin, Eslam El Shamy, Julien Jaeck, Riad Haïdar, Patrick Bouchon
To cite this version:
Denis Langevin, Eslam El Shamy, Julien Jaeck, Riad Haïdar, Patrick Bouchon. Study of disordered
metallic groove arrays with a one-mode analytical model. Optics Express, Optical Society of America
- OSA Publishing, 2020, 28 (15), pp.22549-22561. �10.1364/OE.396204�. �hal-02906216�
Study of disordered metallic groove arrays with a one-mode analytical model
D ENIS L ANGEVIN , 1 E SLAM E L S HAMY , 1 J ULIEN J AECK , 1 R IAD H AÏDAR , 1,2 AND P ATRICK B OUCHON 1,*
1
DOTA, ONERA, Université Paris-Saclay, F-91123 Palaiseau, France
2
École Polytechnique, Département de Physique, 91128 Palaiseau, France
Abstract: Sub-wavelength metallic grooves behave as Fabry-Perot nanocavities able to res- onantly enhance the absorption of light as well as the intensity of the electromagnetic field.
Here, with a one-mode analytical model, we investigate the effect of a correlated disorder on 1D groove arrays i.e., randomly shaped and positioned grooves on a metallic layer. We show that a jitter-based disorder leads to a redistribution of energy compared to the periodic case. In an extreme case, a periodic diffracting array can be converted into a highly scattering array (98%
at λ = 2.8 µm with a 1 µm full width at half maximum). Eventually, we show that the optical response of combinations of variously shaped grooves can be well described by the individual sub-set behaviors.
© 2020 Optical Society of America under the terms of theOSA Open Access Publishing Agreement
1. Introduction
Resonant nanostructures are used to tailor the optical response of large surfaces, and in particular to selectively enhance absorption or thermal emission [1]. For this purpose, Fabry-Perot nanocavities are among the most commonly studied nanostructures as they exhibit appealing features: angular tolerance, strong electromagnetic field enhancement, subwavelength dimensions, and possibility to tailor the spectral response on a large bandwidth [2–4]. These nanocavities, which are typically made of a metal-insulator-metal stack, can be either horizontal (often referred to as MIM nanoantenna) or vertical (grooves) and still exhibit the same optical behavior [5]. The fabrication of such groove arrays is rather challenging in comparison with MIM arrays [4,6,7], but we can make use of scalable techniques [8]. Besides, grooves can be combined in the same subwavelength period to tune the absorption on a wider spectral range [9].
These studies on groove resonators have been done with periodic boundary conditions, while other studies have introduced shape or position disorder in the case of other plasmonic resonators [10–16]. Considering the influence of disorder on resonators is of interest for several reasons.
First, fabrication processes relying on colloids are very useful for large surfaces but cannot produce periodic arrays in most cases. Second, periodicity induces diffracted orders, which can be undesired in some applications such as thermal emission [17], optical filters [18], augmented reality [15], optical stealth [19]. Finally, it has been shown that position disorder can enhance some optical properties such as the resonance bandwidth or the balance between radiative and non-radiative losses [12,15]. However, the introduction of disorder increases the computational cost of simulating the optical response with classical electromagnetic solvers (modal methods, FEM, FDTD) [20,21].
In this article (in section 2), we introduce an analytical one-mode model [22] that reduces the computational burden of simulating random groove arrays. This model is used to study the effect of a correlated disorder, and it is shown in section 3 that disorder converts absorption/diffraction into scattering. We are able to design a structure that is completely scattering over a given spectral band. These results are then extended to a combination of two groove arrays that can be independently disordered in section 4, leading to custom spectral templates. We finally show that
#396204 https://doi.org/10.1364/OE.396204
Journal © 2020 Received 27 Apr 2020; revised 5 Jun 2020; accepted 6 Jul 2020; published 15 Jul 2020
the behavior of such disordered combinations of grooves can be well described by the behavior of the subsets.
2. Analytical model
The model described hereafter is able to compute the optical response of a 1D-array of grooves (permittivity
d) carved in a metallic layer (permittivity
m). This type of structure allows to introduce simplifying assumptions that significantly decrease the computation time. The main assumption is the use of a one-mode formulation for the field within each groove. This has been previously used for 1D lamellar metallic gratings [22], and here we extend these results to multi-groove arrays whose positions and shapes can be randomly chosen. An illustration of such a structure is shown on Fig. 1. It is made of n
Ggrooves, and each groove is defined by its position x
(j)c, width w
(j)and height h
(j). This complex pattern is repeated with a period L
x. The light is incident on the structure with an angle θ, a wavevector k
(0)and a transverse magnetic polarization.
In the following, the e
−iωttime evolution term is not explicitly written, as all calculations are done for monochromatic fields. The grooves have subwavelength dimensions and do not support any propagative TE modes, so only the TM case is described in the following.
Fig. 1. Scheme of a periodic multi-groove structure (period L
x). Each groove is defined by its position x
(cj), width w
(j)and height h
(j). The grooves are carved in a metallic layer.
dand
mare the permittivities inside the groove and of the metal layer.
The expression of the magnetic field inside each groove (zone B of Fig. 1) is simplified thanks to a one-mode formulation [22], which is based on three assumptions:
• the groove widths are small enough with respect to the wavelength so that only one propagative mode exists,
∀j ∈ [ 1, n
G] , w
(j)λ 2 √
d(1)
• the grooves are deep enough with respect to the metal skin depth d
mto neglect contribution of evanescent modes,
∀j ∈ [1, n
G], h
(j)d
m(2)
• the grooves are far enough apart with respect to the metal skin depth to avoid direct coupling between two grooves.
∀j ∈ [ 2, n
G] , x
(j)c− w
(j)2 − x
(j−1)c− w
(j−1)2 >d
m(3)
Then, the propagative mode used to describe the field within groove (j) is written as:
H
(y,Bj)(x, z) = X
0(j)(x) A
(0j)e
ik(j)
z,d(z+h(j))
+ B
(0j)e
−ik(j) z,dz
, (4)
where X
0(j)(x) = cos
k
(j)x,d(x − x
(j)c)
, and A
(j)0(resp. B
(j)0) is the amplitude of the up (resp. down) propagating mode with the associated wavevectors k
(j)z,d
and k
(j)x,d
.
The magnetic field in the upper medium (zone A of Fig. 1) is described using a Rayleigh expansion:
H
y,A(x, z) = e
i(k(0)x x−k(0)z z)+ Õ
n∈Z
R
ne
i(k(n)x x+kz(n)z)(5) where the R
nare the amplitudes in each mode n reflected by the structure, and the wave vectors are k
(n)x= k
x(0)+
2nπLxand k
(n)z= q
k
20− (k
x(n))
2.
In order to compute the optical response of the groove structures, the reflected amplitudes R
nare linked to the groove amplitudes A
(j)0and B
(j)0thanks to the continuity relations of the electromagnetic field at each interface. Besides, the wavevectors k
(j)z,dand k
x,d(j)can be expressed as a function of the groove widths and the permittivities
dand
m.
2.1. Metal-insulator-metal groove wavevector
The metal-insulator-metal groove acts as a waveguide, whose wavevector must satisfy the round-trip condition along the x axis:
(r
d,m)
2e
2ik(j)
x,dw(j)
= 1 (6)
where r
d,mis the TM reflexion coefficient between the dielectric inside the cavity and the metallic walls. With the small width assumption of Eq. (1), Eq. (6) is simplified to:
k
x,m(j) m= k
(j)x,d d©
« i
k
x,d(j)w
(j)2
ª
®
¬
(7)
Using the continuity of the tangential wavevector k
(j)z,d= k
(j)z,m, Eq. (6) becomes:
(k
(j)x,d)
2"
1 + (k
(j)x,d)
2m d 2
w
(j)24
#
= (
d−
m)k
02(8) Since |
m| |
d| , this equation gives the following approximation for the wave vectors [23]:
k
(j)x,d= √
dk
0q
−2i w(j)k0
√m
k
(j)z,d= √
dk
0q
1 +
w(j)k2i0√m
(9)
2.2. Resolution
At the groove apertures, the tangential electromagnetic fields (H
yand E
x) are continuous, and the derivative
∂zHyis also continuous since the Maxwell-Ampere equation leads to E
x=
∂ωzHy.
Then, at the interface between a dielectric and a metal, a surface impedance condition is used [24], to avoid computing the field within the metal layer. This condition writes as follows:
∂
zH
y,A(x, z = 0) = η
AH
y,A(x, z = 0), (10)
with η
A=
i√Akm0.
The first step of the resolution is to express each amplitude of the Rayleigh expansion R
nin Eq. (5) as a function of the amplitudes of the propagative mode in each groove A
(j)0and B
(j)0. It is done by projecting the H
y,Afield on one reflected mode n. For this, the following notations are introduced: β
±(n)= 1 ±
ik(n)
ηzA
, α
(j)±= 1 ±
ik(j) z,dA
ηAd
, γ
(j)=
ik(j) z,d−ηB ikz,d(j)+ηB
.
The following integrals are defined over each groove aperture (j) on their width w
(j): I
(n,j)= ∫
e
ik(n)
x x
dx (11)
Int
(n,j)= ∫ cos
k
(j)x,d(x − x
(j)c)
e
−ik(n)x xdx (12) K
(j)= ∫
cos
k
(j)x,d(x − x
(j)c)
dx (13)
Then, the surface impedance condition at the bottom of groove (j) links the amplitude of the down-propagating mode to the up-propagating mode inside the groove:
B
(j)0= A
(j)0γ
(j)e
−ik(j) z,dh(j)
. (14)
Thus, projecting the H
y,Afield on mode e
−ik(n0)
x x
and using the interface conditions gives:
R
n0= − β
(0)+β
(−0)δ
n00+ 1 L
xβ
(−n0)nG
Õ
j=1
A
(j)0α
−(j)e
ik(j)
z,dh(j)
+ α
(j)+γ
(j)e
−ik(j) z,dh(j)
Int
(n0,j)(15) with δ being the Kronecker symbol.
The second step of the resolution is to integrate the interface conditions over the aperture of groove (j
0) , to express a given groove mode amplitude A
(j00)as a function of the Rayleigh amplitude R
n:
K
(j0)A
(j00)e
ik(j0)
z,dh(j0)
+ γ
(j0)e
−ik(j0) z,dh(j0)
= I
(0,j0)+ Õ
n∈Z
R
nI
(n,j0)(16) Injecting Eq. (15) into Eq. (16), gives a linear system on the amplitudes A
(j)0which can be written in matrix form:
M
AA
0= I
A(17)
with the following expressions for the matrix and vector coefficients:
(M
A)
j1,j2= δ
jj12
K
(j1)e
ik(j1)
z,dh(j1)
+ γ
(j1)e
−ik(j1) z,dh(j1)
− Õ
n∈Z
I
(n,j1)Int
(n,j2)L
xβ
(n)−α
−(j2)e
ik(j2)
z,dh(j2)
+ α
+(j2)γ
(j2)e
−ik(j2) z,dh(j2)
(18) (I
A)
j1= I
(0,j1)1 − β
(0)+β
(0)−!
(19) with j
1the row index and j
2the column index.
To solve this system, the sum on all the reflected modes is truncated at the ±N modes (N should be large enough so that all propagative modes, i.e., modes so that Im(k
(zn)) = 0, are computed).
The values of both the groove amplitudes A
(j)0
and the Rayleigh amplitudes R
nare then found, and the overall reflectivity of the surface can be found as the sum of the energy in each propagative mode:
R
tot=
N
Õ
n=−N
|R
n|
2Re(k
(n)z)
k
(0)z(20)
2.3. Numerical example
This model is used to compute the optical response of a single groove array and is compared to an exact Maxwell’s equations solver, the B-spline Modal Method (BMM) [21]. The groove has subwavelength dimensions with width w
(1)= 0.25 µm, depth h
(1)= 3 µm and is repeated with a period L
x= 6 µm. Gold is used for the metallic parts and its permittivity is modelled following a Drude model in agreement with experimental data in the infrared range [25]:
Au(λ) = 1 − 1/(λ
p/λ(λ
p/λ + iγ)) with λ
p= 159 nm and γ = 0.0075. Thus, the metal skin depth d
mis of the order of 20 nm in the mid-IR range.
Figure 2(b) shows the specular reflection spectra computed using the analytical model (blue dashed curve) and the BMM tool (red curve) for the structure shown in the left half of Fig. 2(a).
Light is incoming at a normal incidence and with TM-polarization. As expected, this structure exhibits Fabry-Perot resonances at the fundamental wavelength λ
1= 14.3 µm and at the first odd harmonic λ
3= 4.65 µm. The position and depth of the resonances are computed with a satisfying precision, which confirms that the optical response of the structure is mainly determined by the fundamental groove mode. Figure 2(c) shows the specular reflection spectra computed using the analytical model (blue dashed curve) and the BMM tool (red curve) for the structure shown in the right half of Fig. 2(a). The structure is much more complex than the one for Fig. 2(b), and its optical response is therefore much less straightforward. However, Fabry-Perot resonances corresponding to the deeper slits are visible at λ = 10.1 µm, λ = 11.8 µm and λ = 13.3 µm.
Fig. 2. Study of the specular reflection of two different periodic structures, i.e., a one-groove
array and a five-groove array, as shown in (a). (b) Comparison between the specular reflection
given by the analytical model and a BMM tool used as reference : The unit cell is 6 µm
large and consists in a single groove of dimensions w = 0.25 µm and h = 3 µm (c) Same
comparison for a unit cell which is 10 µm large and consists in 5 grooves of different depths
and widths, such that w
(j+1)>w
(j)and h
(j+1)>h
(j), with w
(1)= 100 nm, w
(5)= 500 nm,
h
(1)= 1 µm, h
(5)= 2.6 µm.
Again, despite the complexity of this structure, both the analytical model and the BMM tool are in perfect agreement, which confirms that the optical response of the structure is mainly determined by the fundamental groove mode.
This analytical model therefore gives accurate results in terms of reflection spectrum for groove arrays. Its main benefit is a large gain in computation time for more complex structures. Thus, with an 8 core CPU (Intel Xeon 3.6 GHz) and 16 GB RAM, computing the response of one groove at a given wavelength needs 22 ms (resp. 40 ms) with analytical model (resp. BMM), but if the number of grooves is increased to 20, the computation time becomes 3.1 s (resp. 18.1 s) with analytical model (resp. BMM). When computing the optical response of large, disordered arrays, this speed gain gets even more significant.
3. Single groove disorder
3.1. Jitter disorder for subwavelength and diffracting groove arrays
In this section, we apply this model to the study of disordered arrays. A given groove array is disordered by introducing a jitter, i.e., by randomly shifting the position of each groove within a given area. The Random Factor (RF) is defined as the breadth of the applied jitter, as shown in Fig. 3(a). Noteworthily, this type of disorder does not modify the groove density when the position shifts are drawn within a uniform distribution. The case RF = 0 corresponds to the perfectly ordered case, and RF = L
xcorresponds to a highly disordered case. It is the highest random factor so that the groove density is conserved. Besides, the random draws where two grooves are closer than the metal skin depth are discarded.
Fig. 3. Definition of both single- and bigroove random factors (RF). (a) For a single groove array, each groove is displaced by drawing randomly a new position within a uniform distribution of breadth RF and centered on the original groove position. (b) The same uniform random draw principle is applied to bigroove arrays, where in addition a different random factor is used for both groove types: RF
(1)and RF
(2)The analytical model relies on periodic boundary conditions, and in order to apply it to disordered arrays, only m grooves are considered and boundary conditions are applied with a super-period mL
x. The choice of the m does not affect the resulting behavior significantly if it is large enough, i.e., the periodic repetition of m disordered grooves has the same properties as a fully disordered array. In the following, we chose m = 20 as a good trade-off between disorder and computation time. Also, this super-period gives access to more reflected angles θ, following the Rayleigh decomposition described in Eq. (5). Thus, the computed R
nrepresent all possible directions for the reflected field, namely the specular reflection (n = 0), diffracted orders of the ordered array (n = mk, k ∈ Z ) and scattering (n ∈ [mk + 1; (m + 1)k − 1], k ∈ Z ). This is summarized in the following variables:
R
tot=
mN
Õ
n=−mN
|R
n|
2Re(k
(n)z) k
(0)z(21)
R = |R
0|
2Re(k
(z0))
k
(0)z(22)
D =
N
Õ
p=−N