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3D-SEM height maps series to monitor materials corrosion and dissolution

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Academic year: 2021

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Fig. 1. Series of images recorded at different magnifications prior the dissolution test that are used to find the same Region Of Interest (ROI) from one dissolution time to the next one.
Fig. 2. Tilted image series {−10°; 0; 10°} of the same zone of the sample (a, b, c) leading to the 3D surface image reconstruction using Alicona Mex software (d) and the corresponding extracted 16 bits height map (e)
Fig. 4. Height profiles of the same zone (a) extracted from the Mex height map (b) and AFM height map (c)
Fig. 5. Determination of the accuracy of the Mex height values. (a) Relative height difference (%HD) measured between Mex and AFM data at the same (x, y) coordinates and (b) absolute values of the height differences between Mex and AFM measurements (│HD Me
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