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Chemical vapor deposition of iron, iron carbides, and iron nitride films from amidinate precursors

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Academic year: 2021

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Figure

Table I. Flow rate conditions for reactors A and B.
Figure 2. Temperature dependence of gas-phase composition upon decom- decom-position of compound 1 关L = 共C 3 H 7 兲NC共CH 3 兲N共C 3 H 7 兲兴
Table IV. Decomposition of the Fe 2p 3Õ2 and C 1s XPS peaks of films prepared from compound 2: BE and energy drifts are in eV
Figure 4. 共Color online兲 XRD analysis of the films deposited from com- com-pound 1 on copper 共 ↓ 兲 substrates.
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