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Legitimate domain of a Newtonian behavior for thermal nanoimprint lithography

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Academic year: 2021

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Figure 1: Schematic description of one period considered for simulation. The minimal part that need being considered is the darker gray shades
Figure 2: Viscosity of a PS280 at 170 C versus shear rate. Experimental data (circles), Carreau-Yasuda fit (solid curve), asymptotes (horizontal and oblique dashed lines), and critical shear rate ˙ γ 0 (vertical dashed line) are plotted.
Figure 3: Normalized maximum shear rate computed at the beginning of imprint, as a function of the non-dimensional initial thickness h/L and pitch W/L for a critical area defined by ε/L = 4%.
Figure 4: Legitimate domain of a Newtonian behavior as a function of the non-dimensional initial thickness h/L, with W/L = 4, for two values of the critical area size ε/L

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