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Investigation of the initial deposition steps and the interfacial layer of Atomic Layer Deposited (ALD) Al2O3 on Si

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Fig. 2. Model predictions comparison with literature data, using r 0 = 0. Data
Fig. 6 shows that Al is detected on the surface even for the 10 ALD cycles sample. Although the intensity is lower than for the 50 cycles sample, the peak position is the same
Fig. 5. TEM and BF-STEM images of ALD grown Al 2 O 3 layers using: a) 5 (BF-STEM), b) 20 (BF-STEM), c) 200 (TEM) ALD cycles.
Fig. 7 c shows an Al 2 O 3 sample deposited with 20 ALD cycles. The
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