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Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition

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Academic year: 2021

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Fig. 1. Wettability (water droplets) of UV/O 2 treated PPXC films versus the total gas flow rate Q T (O 2 + He) for a surface treatment time τ of 30 min and two O 2 mole fractions.
Fig. 5. Variation of the IR relative intensity of the C=O peak (1710 cm − 1 ) as a function of (a) the treatment time (keeping constant the thickness) and (b) the thickness of PPXC films for different reactive gas atmospheres
Fig. 6. High resolution XPS spectra of PPXC thin films treated under UV/O 2 atmosphere for different times: (a) Cl 2p, (b) C 1s and (c) O 1s region (Q T = 60 sccm and X O 2 = 0.5).
Fig. 8. Relative contribution of the various C containing components (C1, C2, C3 and C4) of UV/O 2 treated PPXC films versus the treatment time
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