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2020 — Suspended carbon nanotube beams fabricated by a low temperature surface micromachined process for humidity and gas sensing

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Figure

Figure 1.2 MEMS Components
Figure 1.3 Lithography in MEMS
Figure 1.4 (a) Isotropic, and (b) Anisotropic etch profile, and,  (c) Cantilever beam fabricated by Bulk Micromachining
Figure 1.6  Schematic of the LIGA Process.
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