UV210 optical microresonators on pedestal

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HAL Id: hal-01090758

https://hal.archives-ouvertes.fr/hal-01090758

Submitted on 4 Dec 2014

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UV210 optical microresonators on pedestal

Marion Specht, Nolwenn Huby, Hervé Lhermite, Bruno Bêche

To cite this version:

Marion Specht, Nolwenn Huby, Hervé Lhermite, Bruno Bêche. UV210 optical microresonators on pedestal. La Journée de l’Ecole Doctorale SDLM, Jan 2015, Rennes, France. 2015. �hal-01090758�

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Rennes

UV210 optical microresonators on pedestal

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Introduction

Cleanroom protocole

Optical characterizations and results

Conclusion

SpectralwanalysiswVwresonanceswinwMRs

vvThevWGMvphysicsvonlyvallowvlightvtoventervintovthevMRsvonlyvifvthew

wavelengthv isv anv integerw multiplew ofw thew geometricalw perimeter/v

Usingv av broadbandv sourceBv thev outputv spectrumv -afterv thev MRskv correspondsv tov thev inputv onev minusv thev resonantw wavelenghts/v Thev distancev betweenv twov resonantv wavelengthsv isv calledv freew spectralw

rangew0FSR/vandvcanvbevmeasuredvonvspectravorvcalculatedvbyvqv

FSRwEwλ_kq70P6n_effgrp/w

wherev Pv isv thev geometricalv perimeterv ofv thev MRv andv n_effgrpw thew effectivew groupw indexBv relevantv indexv forv av broadbandv source/v v v

MeasuredvFSRvarevq6G-wnmwforwthewringwmicroresonatorvandvq6IWwnmw

forwthewracetrackwshape6wFWHMw0δλ/wgivevavqualitywfactorwgreaterw

thanwjkk/vThosevexperimentalvvaluesvleadsvtovanvn_effgrpwEwW6-Uvinsteadv

ofv+/SS=vforvthevUV=+Dvpolymer/vv

wwPropagationwlosseswmeasurementsvdeterminevthevamountvofvlightv

lostvduringv propagationv inv av ribv waveguidevonv pedestalvbyv cutLbackv method/v

C C Cut-backC methodC :v opticalv lossesv determinationv byv measuringv thev relativev variationv ofv outputv powerv forv differentv lengthsv ofv thev samev waveguide/v Onlyv thev outputv facev isv cleavedv tov havev thev samev injectionvconditions/

°eerLLambertvlawvq

Wklogw0P_j7P_i/wEwα60L_i8L_j/

wherev P_i,jv isv thev outputv powerv forv respectivelyv L_iv andv L_jC andv C αv isv thev opticalvlossesvinvd°>cm/v

WevobtainvlosseswaroundwqkwdB7cm6

IvJeepvUVvlithographyvjvchemicalvetchingvvHvpolymervopticalvcomponentsvonvpedestalvforvintegratedvoptics/

IvOpticalvcharacterizationsvqvlossesvaroundv=Dvd°>cmBvFSRvHv=/78vnmv-ringvMRkBv=/6+vnmv-RacetrackvMRkBvn_effgrpvHv+/89/

Iv°uildingvdeepvUV=+DvopticalvcomponentsvonvpedestalBvfromvwaveguidesvstructurevtovMRsvvinvavsimplevandvreproductiblevway/

Iv Thesev specificv UV=+Dv polymerv familyv componentsv arev quitev easyv tov producev andv theyv canv bev implementedv forv filtersv orv futuresv opticalv sensorsvapplications/

wwIntegratedwopticsvisvanvequivalentvofvmicrolectronicsvbutvwithvlight/vThisvisvavkeyvfieldvinvnewwtechnologiesvduevtovitsv

potentialv ofv lowLcostv andv highLspeedv integratedv circuits/v Microresonatorsw 0MRs/v arev majorv componentsv thanksv tov theirv propertiesvasvfiltersvorvsensors/vWhisperingwGallerywModesw0WGMs/vrulesvthevMRs0vphysics/vThesevmodesvappearvnearv thevMRs0vsurfaceBvwhenvlightwiswconfinedwbywtotalwinternalwreflections/vvPolymersvarevwellvadaptedvmaterialsvduevtovtheirv widev rangev ofv properties/v Wev usev thev UVqWkBv whichv refractivev indexv isv tunable/v MoreoverBv pedestalsv offerv interestigv possibilitiesvbyvimprovingwefficiencyvandvgivingvnewvgeometriesvforvcouplingvlightvintovMRs/ Fig6wqwVw9wµmwwaveguidewonwpedestalw0SEMwimagery/ Fig6w5wVwRacetrackwMRw0SEMwimagery/w Fig6w9wVwRingwmicroresonatorw0SEMwimagery/ Fig6wWwVwschematicwWGM w Fig6wjwVwMicro8opticalwinjectionwplateformwforwopticalwlosseswmeasurementswandwspectralw analysiswofwresonanceswintowMRs6ww Fig6wIwVwexperimentalwresponsewofwawredwbroadbandwsourcewintowawracetrackwpedestalwMRw 0onwthewleft/wandwaringwpedestalwMRw0onwthewright/ Fig6w-wVwgraphicalwmeasurementwofwopticalw losses Processwsteps _Parameters PostLexposurevsoftbake-tBvTk Jevelopmentv-productBvtk Finalvsoftbakev-tBvTk °uffervHFvImprovedv-Transenek etchingv-tk SpinLcoatingv-vBvaBvtk Softbakev-tBvTk Exposurevdosev -EBvtvatvλ_JUVHv=F7vnmkv zvminvatv+FD°C =DvmJ/cmL=Bv+Dvs 9DDvrpmBvSDDDvrpm/sL+BvzDvs +vminvatv+=D°C MicropositvMFvCJL=8BvzDs Shvatv+=S°C 9Dvs