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Microcrystalline silicon deposited from SiF4/H2/Ar plasmas and its application to photovoltaics

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Figure 2: Energy consumption in 2013 by types of fuels for USE, China, Brazil, and France
Figure 4: Growth of the world consumption of renewable energy between 2003 and 2013.
Figure 7: Picture of PHILIX reactor with the chamber is opened.
Figure 13: H 2  depletion and deposition rate for argon flow rate series.
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